Dimensions
DimensionsPandian, M.S. and Marigo, E. and Shunmugam, M. and Hussain, R.B. and Song, C.T.W. and Din, J.B.J. and Fei, C.B. and Madhaven, V. and Kantimahanti, A.K. and Malik, A.F. and Jeoti, V. (2015) Investigation on Surface Acoustic Wave propagation for a non-planar piezoelectric thin film device. In: UNSPECIFIED.
Full text not available from this repository.Abstract
In this paper we present a study on the surface acoustic wave propagation performance and coupling coefficient for a non-planar thin film Surface Acoustic Wave device (SAW). Piezoelectric Aluminum Nitride (AlN) thin film is deposited on top of the Inter Digital Transducer (IDT) by a non conformal physical vapor deposition process. Non-planarity around the transducer impedes the wave propagation, this effect is investigated using SAW delay lines. © 2015 IEEE.
| Item Type: | Conference or Workshop Item (UNSPECIFIED) |
|---|---|
| Additional Information: | cited By 4; Conference of IEEE International Ultrasonics Symposium, IUS 2015 ; Conference Date: 21 October 2015 Through 24 October 2015; Conference Code:118680 |
| Uncontrolled Keywords: | Acoustic surface wave devices; Acoustic waves; Acoustics; Aluminum; Aluminum coatings; Aluminum nitride; Deposition; Nitrides; Physical vapor deposition; Piezoelectricity; Thin film devices; Thin films; Transducers; Ultrasonic transducers; Vapor deposition, Aluminum nitride (AlN); Coupling coefficient; Interdigital transducer; Physical vapor deposition process; Piezoelectric thin film devices; SAW delay line; Surface acoustic wave propagation; Thin film surfaces, Acoustic wave propagation |
| Depositing User: | Mr Ahmad Suhairi UTP |
| Date Deposited: | 09 Nov 2023 16:17 |
| Last Modified: | 09 Nov 2023 16:17 |
| URI: | https://khub.utp.edu.my/scholars/id/eprint/5620 |
Actions (login required)
- View Item