This paper presents the characterisation of hybrid treated layer on austenitic AISI 316L stainless steels using field emission scanning electron microscope (FESEM), universal scanning probe microscope (USPM) and nanoindentation after low temperature thermochemical treatments. By using these methods, the improvement of its mechanical properties due to the diffusion of carbon and nitrogen at low temperature treatments were confirmed. The hybrid treated layer has shown increment of hardness and elastic modulus compared to untreated sample. Based on the investigation, it is shown that all treated samples have enhanced E/H ratio which demonstrated the decreasing tendency to plastic deformation and reduced the disparity of properties, while keeping deformation within the elastic range. Copyright © 2014 Inderscience Enterprises Ltd.