Design and simulation of mass-sensitive gas sensor based on CMOS-MEMS resonator

Ahmed, A.Y. and Dennis, J.O. and Md. Khir, M.H. and Mohamad Saad, M.N. (2012) Design and simulation of mass-sensitive gas sensor based on CMOS-MEMS resonator. In: UNSPECIFIED.

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Abstract

This paper is mainly focused on the design and simulation of a micromachined CMOS-MEMS resonator for gas sensing applications. The principle of detection of the gaseous species is based on the change in resonant frequency of the microresonator as a result of the adsorption of an analyte molecule onto the surface of the active material deposited on the microresonator resulting into a change of the mass of the microresonator device. Coventor Ware simulation software is used to design and simulate the micromachined microresonator gas sensing platforms. Simulation results show a resonant frequency of 20162.3 Hz for the resonator. © 2012 American Institute of Physics.

Item Type: Conference or Workshop Item (UNSPECIFIED)
Additional Information: cited By 3; Conference of 2nd International Conference on Fundamental and Applied Sciences 2012, ICFAS 2012 ; Conference Date: 12 June 2012 Through 14 June 2012
Depositing User: Mr Ahmad Suhairi UTP
Date Deposited: 09 Nov 2023 15:50
Last Modified: 09 Nov 2023 15:50
URI: https://khub.utp.edu.my/scholars/id/eprint/2554

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