Resist-Free Directed Self-Assembly Chemo-Epitaxy Approach for Line/Space Patterning

by Tommaso Jacopo Giammaria, Ahmed Gharbi, Anne Paquet, Paul Nealey, Raluca Tiron
Published 2020-12-01

Exploring Strategies to Contact 3D Nano-Pillars

by Esteve Amat, Alberto del Moral, Marta Fernández-Regúlez, Laura Evangelio, Matteo Lorenzoni, Ahmed Gharbi, Guido Rademaker, Marie-Line Pourteau, Raluca Tiron, Joan Bausells, Francesc Perez-Murano
Published 2020-04-01

Water-soluble bio-sourced resists for DUV lithography in a 200/300 mm pilot line environment

by Isabelle Servin, Alexandre Teolis, Arnaud Bazin, Paule Durin, Olha Sysova, Corinne Gablin, Benoît Saudet, Didier Leonard, Olivier Soppera, Jean-Louis Leclercq, Yann Chevolot, Raluca Tiron, Thierry Delair, Stéphane Trombotto
Published 2023-06-01