Electronic properties of ZrO2 films fabricated via atomic layer deposition on 4H-SiC and Si substrates

by Xi-Rui Wang, Yu-Xuan Zeng, Jie Zhang, Wei Huang, Hong-Ping Ma, Qing-Chun Zhang
Published 2024-01-01

Atomic-Level Sn Doping Effect in Ga₂O₃ Films Using Plasma-Enhanced Atomic Layer Deposition

by Yi Shen, Hong-Ping Ma, Lin Gu, Jie Zhang, Wei Huang, Jing-Tao Zhu, Qing-Chun Zhang
Published 2022-11-01

Influence of Rapid Thermal Annealing on the Characteristics of Sn-Doped Ga₂O₃ Films Fabricated Using Plasma-Enhanced Atomic Layer Deposition

by Yi Shen, Hong-Ping Ma, Zhen-Yu Wang, Lin Gu, Jie Zhang, Ao Li, Ming-Yang Yang, Qing-Chun Zhang
Published 2023-02-01

Atomic Layer Deposition of Buffer Layers for the Growth of Vertically Aligned Carbon Nanotube Arrays

by Hao-Hao Li, Guang-Jie Yuan, Bo Shan, Xiao-Xin Zhang, Hong-Ping Ma, Ying-Zhong Tian, Hong-Liang Lu, Johan Liu
Published 2019-04-01

Enhanced piezoelectric performance of the ZnO/AlN stacked nanofilm nanogenerator grown by atomic layer deposition

by Li-Yuan Zhu, Jian-Guo Yang, Kaiping Yuan, Hong-Yan Chen, Tao Wang, Hong-Ping Ma, Wei Huang, Hong-Liang Lu, David Wei Zhang
Published 2018-12-01

Measurements of Microstructural, Chemical, Optical, and Electrical Properties of Silicon-Oxygen-Nitrogen Films Prepared by Plasma-Enhanced Atomic Layer Deposition

by Hong-Ping Ma, Hong-Liang Lu, Jia-He Yang, Xiao-Xi Li, Tao Wang, Wei Huang, Guang-Jie Yuan, Fadei F. Komarov, David Wei Zhang
Published 2018-12-01