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Design and simulation of mass-sensitive gas sensor based on CMOS-MEMS resonator
Conference Paper
http://dx.doi.org/10.1063/1.4757556
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authors
Ahmed, A. Y.
Dennis, J. O.
Md Khir, Mohd Haris Bin
Mohamad Saad, Mohamad Naufal
publication date
2012
published in
INTERNATIONAL SYMPOSIUM ON GREEN AND SUSTAINABLE TECHNOLOGY (ISGST2019)
Journal
Identity
Digital Object Identifier (DOI)
https://doi.org/10.1063/1.4757556
