MEMS 3-DoF gyroscope design, modeling and simulation through equivalent circuit lumped parameter model Conference Paper

http://dx.doi.org/10.1063/1.4919163

authors

Mian, Muhammad Umer
Dennis, John Ojur
Md Khir, Mohd Haris Bin
Riaz, Kashif
Iqbal, Abid
Bazaz, Shafaat A.
Tang, Tong Boon

publication date

2015

published in

INTERNATIONAL SYMPOSIUM ON GREEN AND SUSTAINABLE TECHNOLOGY (ISGST2019) Journal

Digital Object Identifier (DOI)

https://doi.org/10.1063/1.4919163