Development of autonomous maintenance implementation framework for semiconductor industries Academic Article

http://dx.doi.org/10.1504/ijise.2011.043139

authors

Min, Chen Shin
Ahmad, Rosmaini
Kamaruddin, Shahrul Bin
Azid, Ishak Abdul

publication date

2011

published in

International Journal of Industrial and Systems Engineering Journal

Digital Object Identifier (DOI)

https://doi.org/10.1504/ijise.2011.043139

start page

268

volume

9

issue

3