Article

Aslam, M.Z. and Jeoti, V. and Karuppanan, S. and Pandian, M.S. and Ferrer, E.M. and Suresh, K. (2020) Surface acoustic wave modes characteristics of CMOS compatible SiO2/AlN/SiO2/Si multilayer structure with embedded electrodes. Sensors and Actuators, A: Physical, 313. ISSN 09244247

Conference or Workshop Item

Malik, A.F. and Jeoti, V. and Fawzy, M. and Iqbal, A. and Aslam, Z. and Pandian, M.S. and Marigo, E. (2017) Estimation of SAW velocity and coupling coefficient in multilayered piezo-substrates AlN/SiO2/Si. In: UNSPECIFIED.

Pandian, M.S. and Marigo, E. and Shunmugam, M. and Hussain, R.B. and Song, C.T.W. and Din, J.B.J. and Fei, C.B. and Madhaven, V. and Kantimahanti, A.K. and Malik, A.F. and Jeoti, V. (2015) Investigation on Surface Acoustic Wave propagation for a non-planar piezoelectric thin film device. In: UNSPECIFIED.