Article

Rouhi, J. and Mahmud, S. and Hutagalung, S.D. and Naderi, N. and Kakooei, S. and Abdullah, M.J. (2012) Controlling the shape and gap width of silicon electrodes using local anodic oxidation and anisotropic TMAH wet etching. Semiconductor Science and Technology, 27 (6). ISSN 02681242