TY  - CONF
A1  - Ahmed, M.G.
A1  - Dennis, J.O.
A1  - Khir, M.H.M.
A1  - Rabih, A.A.S.
UR  - https://www.scopus.com/inward/record.uri?eid=2-s2.0-85057551058&doi=10.1109%2fICCCEEE.2018.8515788&partnerID=40&md5=9a2fe18cef8d23fcaf2d8c947d9ee295
PB  - Institute of Electrical and Electronics Engineers Inc.
SN  - 9781538641231
Y1  - 2018///
TI  - Characterization of Micro-heater and Temperature Sensor in Micro-electromechanical System Device for Gas Detection
ID  - scholars9834
KW  - Electric reactors; Electromechanical devices; Gas detectors; Gold; Heating equipment; MEMS; Temperature sensors
KW  -  Gas detection; Increasing temperatures; Micro electro mechanical system; Micro-heaters; Multi-user; Operating temperature; Polymumps; Temperature coefficient of resistance
KW  -  Temperature
N2  - Operating temperature is crucial for a Polysilicon Multi-User Micro electro-mechanical system Processes (PolyMUMPs) gas sensor considering the serious impacts on sensors' selectivity and reliability. While it is difficult to measure this operating temperature because the size of the sensor. This paper studies the characterization of micro-heater and temperature sensor made of gold metal, embedded in the device. The measured resistance for the temperature sensor is found to be close to the modelled values within 0.69  error. Temperature coefficient of resistance (TCR) of the temperature sensor in a range of 25-105°C is found. TCR increases Iinearly with increasing the temperature and decreases Iinearly with decreasing the temperature. It was found to be 0.00326/°C for the increasing temperature and 0.0034/°C for the decreasing temperature, compared to 0.00325/°C reported TCR for gold in the literature, with an error of 4.12 and 4.37, respectively. © 2018 IEEE.
N1  - cited By 2; Conference of 2018 International Conference on Computer, Control, Electrical, and Electronics Engineering, ICCCEEE 2018 ; Conference Date: 12 August 2018 Through 14 August 2018; Conference Code:141871
AV  - none
ER  -