?url_ver=Z39.88-2004&rft_id=10.1109%2FICIAS.2010.5716208&rft_val_fmt=info%3Aofi%2Ffmt%3Akev%3Amtx%3Abook&rft.aulast=Ahmad&rft.au=Ahmad%2C+F.&rft.aufirst=F.&rft.isbn=9781424466238&rft.date=2010&rft.title=Modeling+and+characterization+of+electrostatically+actuated+CMOS-MEMS+resonator+for+magnetic+field+sensing&rft.genre=proceeding