<> "The repository administrator has not yet configured an RDF license."^^ . <> . . . "FEM Simulation Analysis of AlN/SiO 2 /Si Multilayer Structure and Effect of IDT Configuration on SAW Propagation Modes and Characteristics"^^ . "In this paper, Finite Element Method (FEM) simulation analysis of a CMOS compatible AlN/SiO 2/ Si SAW device is performed to investigate the Surface Acoustic Wave (SAW) modes and their propagation characteristics. A SAW resonator was simulated based on piezoelectric thin film of Aluminum Nitride (AlN) on passivated silicon (SiO 2 /Si) substrate. The SAW properties of AlN film on SiO 2 /Si were analyzed with two composite structures: (IDT)/AlN/SiO 2 /Si and AlN/(IDT)/SiO 2 /Si, and they revealed some good SAW properties. The maximum value of k 2 is almost same for both SAW modes with both IDT configurations, but on different values of tAlNλ and tSiO 2 λ. The results stipulate a theoretical basis for further application on high frequency SAW devices. The proposed SAW device based on AlN/SiO 2 /Si structure have potential applications in integrated sensing applications. © 2018 IEEE."^^ . "2018" . . . "Institute of Electrical and Electronics Engineers Inc."^^ . . "Institute of Electrical and Electronics Engineers Inc."^^ . . . "International Conference on Intelligent and Advanced System, ICIAS 2018"^^ . . . . . . . . . . . . . . . . . "A.F."^^ . "Malik"^^ . "A.F. Malik"^^ . . "V."^^ . "Jeoti"^^ . "V. Jeoti"^^ . . "M.Z."^^ . "Aslam"^^ . "M.Z. Aslam"^^ . . "S."^^ . "Karuppanan"^^ . "S. Karuppanan"^^ . . . . . "HTML Summary of #9647 \n\nFEM Simulation Analysis of AlN/SiO 2 /Si Multilayer Structure and Effect of IDT Configuration on SAW Propagation Modes and Characteristics\n\n" . "text/html" . .