?url_ver=Z39.88-2004&rft_id=10.1109%2FICIAS.2018.8540581&rft_val_fmt=info%3Aofi%2Ffmt%3Akev%3Amtx%3Abook&rft.aufirst=M.Z.&rft.aulast=Aslam&rft.au=Aslam%2C+M.Z.&rft.title=FEM+Simulation+Analysis+of+AlN%2FSiO+2+%2FSi+Multilayer+Structure+and+Effect+of+IDT+Configuration+on+SAW+Propagation+Modes+and+Characteristics&rft.date=2018&rft.isbn=9781538672693&rft.genre=proceeding