eprintid: 9612
rev_number: 2
eprint_status: archive
userid: 1
dir: disk0/00/00/96/12
datestamp: 2023-11-09 16:36:15
lastmod: 2023-11-09 16:36:15
status_changed: 2023-11-09 16:29:24
type: conference_item
metadata_visibility: show
creators_name: Bade, L.A.
creators_name: Dennis, J.O.
creators_name: Md Khir, M.H.
creators_name: Wen, W.P.
title: Design of tunable interdigital capacitor
ispublished: pub
keywords: Actuators; Capacitance; Electromechanical devices; MEMS, Capacitance values; Capacitor structures; Inter-digital capacitors; Interdigitated capacitors; Manufacturing process; Measured results; Rotor and stators; Silicon substrates, Substrates
note: cited By 0; Conference of 5th International Conference on Fundamental and Applied Sciences, ICFAS 2018 ; Conference Date: 13 August 2018 Through 15 August 2018; Conference Code:142772
abstract: In this paper, a MetalMUMPs (Multi-User Microelectromechanical System Processes) based tunable interdigitated capacitor is proposed. The tunable interdigitated capacitor consists of thermal actuator, guided beam, and twelve closely coupled parallel fingers lines to produce a nominal capacitance value of about 40.863 fF capable to tune till 326.902 fF. It actuated (tunned) thermally by applying a voltage across the thermal actuator to decreased distance between capacitor rotor and stator then capacitor becomes more capacitive, due to the increase in fringing fields between the fingers. The tunable interdigitated capacitor was fabricated on a standard low-resistivity substrate adopting MetalMUMPs manufacturing process. It was suspended by 25μm from the inner surface of the etched silicon substrate. It typical called microstrip tunable interdigitated capacitor. The capacitor was designed using 2008 CoventorWare software and fabricated based on MetalMUMPs technology. The measured capacitor structure is 494�520 μm 2 . The measured results show good compatible with theoretical one. © Published under licence by IOP Publishing Ltd.
date: 2018
publisher: Institute of Physics Publishing
official_url: https://www.scopus.com/inward/record.uri?eid=2-s2.0-85058212583&doi=10.1088%2f1742-6596%2f1123%2f1%2f012008&partnerID=40&md5=dced3b4e0e027b9801394bce701d44a6
id_number: 10.1088/1742-6596/1123/1/012008
full_text_status: none
publication: Journal of Physics: Conference Series
volume: 1123
number: 1
refereed: TRUE
issn: 17426588
citation:   Bade, L.A. and Dennis, J.O. and Md Khir, M.H. and Wen, W.P.  (2018) Design of tunable interdigital capacitor.  In: UNSPECIFIED.