?url_ver=Z39.88-2004&rft_val_fmt=info%3Aofi%2Ffmt%3Akev%3Amtx%3Ajournal&rft.aulast=Ahmed&rft.au=Ahmed%2C+A.Y.&rft.aufirst=A.Y.&rft.pages=83-87&rft.atitle=High+sensitivity+CMOS-+MEMS+relative+humidity+sensor+based+on+electrothermal+actuation&rft.issue=3-8&rft.volume=9&rft.issn=21801843&rft.date=2017&rft.title=Journal+of+Telecommunication%2C+Electronic+and+Computer+Engineering&rft.genre=article