?url_ver=Z39.88-2004&rft_id=10.1109%2FICIAS.2016.7824112&rft_val_fmt=info%3Aofi%2Ffmt%3Akev%3Amtx%3Abook&rft.au=Malik%2C+A.F.&rft.aulast=Malik&rft.aufirst=A.F.&rft.title=Estimation+of+SAW+velocity+and+coupling+coefficient+in+multilayered+piezo-substrates+AlN%2FSiO2%2FSi&rft.isbn=9781509008452&rft.date=2017&rft.genre=proceeding