?url_ver=Z39.88-2004&rft_id=10.1109%2FICIAS.2016.7824037&rft_val_fmt=info%3Aofi%2Ffmt%3Akev%3Amtx%3Abook&rft.aulast=Rabih&rft.au=Rabih%2C+A.A.S.&rft.aufirst=A.A.S.&rft.title=Study+of+damping+effect+on+CMOS-MEMS+resonator+for+biomarker+detection+in+exhaled+breath&rft.date=2017&rft.isbn=9781509008452&rft.genre=proceeding