?url_ver=Z39.88-2004&rft_id=10.1109%2FICIAS.2016.7824083&rft_val_fmt=info%3Aofi%2Ffmt%3Akev%3Amtx%3Abook&rft.aulast=Shoaib&rft.au=Shoaib%2C+M.&rft.aufirst=M.&rft.title=Effects+of+edge+cracks+on+the+dynamics+of+piezoelectric+cantilever+based+MEMS+sensor&rft.date=2017&rft.isbn=9781509008452&rft.genre=proceeding