?url_ver=Z39.88-2004&rft_id=10.1109%2FICIAS.2016.7824056&rft_val_fmt=info%3Aofi%2Ffmt%3Akev%3Amtx%3Abook&rft.aufirst=M.U.&rft.aulast=Mian&rft.au=Mian%2C+M.U.&rft.isbn=9781509008452&rft.date=2017&rft.title=CMOS-MEMS+resonator+parametric+variation+analysis+through+equivalent+circuit+modeling&rft.genre=proceeding