TY  - CONF
CY  - Kuala Lumpur
AV  - none
N1  - cited By 11; Conference of 2010 Asia Pacific Conference on Circuit and System, APCCAS 2010 ; Conference Date: 6 December 2010 Through 9 December 2010; Conference Code:85160
N2  - A novel design of 0.751MHz MEMS resonant magnetic field sensor of mass 0.775pg based on hybrid actuation technique (Lorentz force and Electrostatic force) is presented and simulated using Coventor Ware and CADENCE simulators. The sensor consists of Aluminum paddle resonator, two supporting beams, driving electrodes, sensing electrode and silicon substrate with a capacitive CMOS readout amplifier. Working in a resonant condition, the sensor's vibration amplitude is converted into the sensing capacitance change, which reflects the outside magnetic flux-density. Based on the simulation, the key structure parameters are optimized and the resonant frequency is estimated. The results of the device are in accordance with the theoretical results of the designed model. The resolution of the sensor is 1 nT. The results indicate its sensitivity more than 0.01 nV/nT, when operating at a normal atmosphere. The sensitivity and resolution can be enhanced through vacuum packaging. © 2010 IEEE.
KW  - Capacitance change; CMOS technology; Design and modeling; Designed models; Electrostatic actuation; Hybrid actuation; Lorentz; Magnetic field sensing; MEMS Resonator; MEMS resonators; Novel design; Paddle resonators; Read-out amplifiers; Resonant condition; Resonant magnetic field sensors; Sensing electrode; Silicon substrates; Structure parameter; Theoretical result; Vacuum packaging; Vibration amplitude
KW  -  CMOS integrated circuits; Electrostatic actuators; Electrostatics; Lorentz force; Magnetic fields; Magnetic flux; Magnetic sensors; Microelectromechanical devices; Natural frequencies
KW  -  Resonators
TI  - Design and modeling of MEMS resonator for magnetic field sensing using hybrid actuation technique
ID  - scholars859
SP  - 827
Y1  - 2010///
SN  - 9781424474561
UR  - https://www.scopus.com/inward/record.uri?eid=2-s2.0-79959204829&doi=10.1109%2fAPCCAS.2010.5775024&partnerID=40&md5=ab4fb7960a5510c18210845797fe5f42
A1  - Ahmad, F.
A1  - Dennis, J.O.
A1  - Hamid, N.H.
A1  - Md Khir, M.H.
A1  - Ahmed, A.Y.
EP  - 830
ER  -