?url_ver=Z39.88-2004&rft_id=10.1109%2FPRIMEASIA.2017.8280361&rft_val_fmt=info%3Aofi%2Ffmt%3Akev%3Amtx%3Abook&rft.aulast=Basuwaqi&rft.au=Basuwaqi%2C+A.M.&rft.aufirst=A.M.&rft.issn=21592144&rft.isbn=9781538605240&rft.title=Effects+of+frequency+and+voltage+on+the+output+of+CMOS-MEMS+device&rft.date=2017&rft.genre=proceeding