eprintid: 853
rev_number: 2
eprint_status: archive
userid: 1
dir: disk0/00/00/08/53
datestamp: 2023-11-09 15:49:00
lastmod: 2023-11-09 15:49:00
status_changed: 2023-11-09 15:38:36
type: conference_item
metadata_visibility: show
creators_name: Ahmed, A.Y.
creators_name: Dennis, J.O.
creators_name: Mohamad Saad, M.N.
title: Design, simulation, modeling and characterization of micromachined microcantilever using coventorware software
ispublished: pub
keywords: Analytical model; Analytical modeling; CoventorWare; Device performance; Gas sensing; Micro cantilever sensors; Micro-cantilevers; Micromachined; Modeling and simulation; Periodic forces; Sensing areas; Simulation software, Composite micromechanics; Computer simulation; Electric network analysis; Mathematical models; Natural frequencies, Computer software
note: cited By 4; Conference of 2010 Asia Pacific Conference on Circuit and System, APCCAS 2010 ; Conference Date: 6 December 2010 Through 9 December 2010; Conference Code:85160
abstract: Modeling and simulation of a microcantilever designed to achieve high resonant frequency on the sensing area is presented in this paper. Simple analytical models of the microcantilever are generated to achieve estimates of the device performance and to check the validity of the subsequent simulation. CoventorWare simulation software is used to design and process the micromachined microcantilever gas sensing platforms. Results indicate that with a periodic force of amplitude 0.05 N applied at the top of microcantilever, increasing its thickness from μ1 m to 5 μm increases the natural frequency from 10.203 KHz to 50.709 KHz. On the other hand an increase in the lengths of the microcantilever from 90 μm to 170 μm decreases its natural frequency from 30.437 KHz to 17.70 KHz, while increasing its widths from 60 μm to 140 μm increases its natural frequency from 23.854 KHz to 35.84 KHz. A comparison between simulation and mathematical model results for frequency showed close agreement. © 2010 IEEE.
date: 2010
official_url: https://www.scopus.com/inward/record.uri?eid=2-s2.0-79959263918&doi=10.1109%2fAPCCAS.2010.5774753&partnerID=40&md5=aae4e78d846e93e92dd1d9cc104f6e7c
id_number: 10.1109/APCCAS.2010.5774753
full_text_status: none
publication: IEEE Asia-Pacific Conference on Circuits and Systems, Proceedings, APCCAS
place_of_pub: Kuala Lumpur
pagerange: 820-823
refereed: TRUE
isbn: 9781424474561
citation:   Ahmed, A.Y. and Dennis, J.O. and Mohamad Saad, M.N.  (2010) Design, simulation, modeling and characterization of micromachined microcantilever using coventorware software.  In: UNSPECIFIED.