%D 2010 %C Kuala Lumpur %T Design, simulation, modeling and characterization of micromachined microcantilever using coventorware software %O cited By 4; Conference of 2010 Asia Pacific Conference on Circuit and System, APCCAS 2010 ; Conference Date: 6 December 2010 Through 9 December 2010; Conference Code:85160 %R 10.1109/APCCAS.2010.5774753 %L scholars853 %P 820-823 %A A.Y. Ahmed %A J.O. Dennis %A M.N. Mohamad Saad %X Modeling and simulation of a microcantilever designed to achieve high resonant frequency on the sensing area is presented in this paper. Simple analytical models of the microcantilever are generated to achieve estimates of the device performance and to check the validity of the subsequent simulation. CoventorWare simulation software is used to design and process the micromachined microcantilever gas sensing platforms. Results indicate that with a periodic force of amplitude 0.05 N applied at the top of microcantilever, increasing its thickness from μ1 m to 5 μm increases the natural frequency from 10.203 KHz to 50.709 KHz. On the other hand an increase in the lengths of the microcantilever from 90 μm to 170 μm decreases its natural frequency from 30.437 KHz to 17.70 KHz, while increasing its widths from 60 μm to 140 μm increases its natural frequency from 23.854 KHz to 35.84 KHz. A comparison between simulation and mathematical model results for frequency showed close agreement. © 2010 IEEE. %J IEEE Asia-Pacific Conference on Circuits and Systems, Proceedings, APCCAS %K Analytical model; Analytical modeling; CoventorWare; Device performance; Gas sensing; Micro cantilever sensors; Micro-cantilevers; Micromachined; Modeling and simulation; Periodic forces; Sensing areas; Simulation software, Composite micromechanics; Computer simulation; Electric network analysis; Mathematical models; Natural frequencies, Computer software