?url_ver=Z39.88-2004&rft_id=10.1109%2FJSEN.2017.2737044&rft_val_fmt=info%3Aofi%2Ffmt%3Akev%3Amtx%3Ajournal&rft.aufirst=M.&rft.aulast=Shoaib&rft.au=Shoaib%2C+M.&rft.atitle=Effects+of+Crack+Faults+on+the+Dynamics+of+Piezoelectric+Cantilever-Based+MEMS+Sensor&rft.pages=6279-6294&rft.issue=19&rft.volume=17&rft.issn=1530437X&rft.date=2017&rft.title=IEEE+Sensors+Journal&rft.genre=article