?url_ver=Z39.88-2004&rft_id=10.1109%2FRSM.2017.8069109&rft_val_fmt=info%3Aofi%2Ffmt%3Akev%3Amtx%3Abook&rft.au=Rabih%2C+A.A.S.&rft.aufirst=A.A.S.&rft.aulast=Rabih&rft.isbn=9781509040285&rft.title=MetalMUMPs+resonator+for+acetone+vapor+sensing&rft.date=2017&rft.genre=proceeding