?url_ver=Z39.88-2004&rft_id=10.1109%2FRSM.2017.8069110&rft_val_fmt=info%3Aofi%2Ffmt%3Akev%3Amtx%3Abook&rft.aulast=Ahmed&rft.au=Ahmed%2C+A.Y.&rft.aufirst=A.Y.&rft.date=2017&rft.title=Theoretical+modeling+and+FEA+simulation+of+a+CMOS-MEMS+resonator&rft.isbn=9781509040285&rft.genre=proceeding