eprintid: 7950
rev_number: 2
eprint_status: archive
userid: 1
dir: disk0/00/00/79/50
datestamp: 2023-11-09 16:19:47
lastmod: 2023-11-09 16:19:47
status_changed: 2023-11-09 16:10:48
type: article
metadata_visibility: show
creators_name: Shoaib, M.
creators_name: Hamid, N.H.
creators_name: Malik, A.F.
creators_name: Zain Ali, N.B.
creators_name: Tariq Jan, M.
title: A Review on Key Issues and Challenges in Devices Level MEMS Testing
ispublished: pub
keywords: MEMS, Accurate measurement; Issues and challenges; Mass production; Micro electromechanical system (MEMS); Nondeterministic behavior; Operating condition; Parallel testing; Production phase, Electromechanical devices
note: cited By 36
abstract: The present review provides information relevant to issues and challenges in MEMS testing techniques that are implemented to analyze the microelectromechanical systems (MEMS) behavior for specific application and operating conditions. MEMS devices are more complex and extremely diverse due to the immersion of multidomains. Their failure modes are distinctive under different circumstances. Therefore, testing of these systems at device level as well as at mass production level, that is, parallel testing, is becoming very challenging as compared to the IC test, because MEMS respond to electrical, physical, chemical, and optical stimuli. Currently, test systems developed for MEMS devices have to be customized due to their nondeterministic behavior and complexity. The accurate measurement of test systems for MEMS is difficult to quantify in the production phase. The complexity of the device to be tested required maturity in the test technique which increases the cost of test development; this practice is directly imposed on the device cost. This factor causes a delay in time-to-market. © 2016 Muhammad Shoaib et al.
date: 2016
publisher: Hindawi Limited
official_url: https://www.scopus.com/inward/record.uri?eid=2-s2.0-84960977862&doi=10.1155%2f2016%2f1639805&partnerID=40&md5=ff7593e8cb5ee61cbd744792bdb0bd35
id_number: 10.1155/2016/1639805
full_text_status: none
publication: Journal of Sensors
volume: 2016
refereed: TRUE
issn: 1687725X
citation:   Shoaib, M. and Hamid, N.H. and Malik, A.F. and Zain Ali, N.B. and Tariq Jan, M.  (2016) A Review on Key Issues and Challenges in Devices Level MEMS Testing.  Journal of Sensors, 2016.   ISSN 1687725X