relation: https://khub.utp.edu.my/scholars/7950/
title: A Review on Key Issues and Challenges in Devices Level MEMS Testing
creator: Shoaib, M.
creator: Hamid, N.H.
creator: Malik, A.F.
creator: Zain Ali, N.B.
creator: Tariq Jan, M.
description: The present review provides information relevant to issues and challenges in MEMS testing techniques that are implemented to analyze the microelectromechanical systems (MEMS) behavior for specific application and operating conditions. MEMS devices are more complex and extremely diverse due to the immersion of multidomains. Their failure modes are distinctive under different circumstances. Therefore, testing of these systems at device level as well as at mass production level, that is, parallel testing, is becoming very challenging as compared to the IC test, because MEMS respond to electrical, physical, chemical, and optical stimuli. Currently, test systems developed for MEMS devices have to be customized due to their nondeterministic behavior and complexity. The accurate measurement of test systems for MEMS is difficult to quantify in the production phase. The complexity of the device to be tested required maturity in the test technique which increases the cost of test development; this practice is directly imposed on the device cost. This factor causes a delay in time-to-market. © 2016 Muhammad Shoaib et al.
publisher: Hindawi Limited
date: 2016
type: Article
type: PeerReviewed
identifier:   Shoaib, M. and Hamid, N.H. and Malik, A.F. and Zain Ali, N.B. and Tariq Jan, M.  (2016) A Review on Key Issues and Challenges in Devices Level MEMS Testing.  Journal of Sensors, 2016.   ISSN 1687725X     
relation: https://www.scopus.com/inward/record.uri?eid=2-s2.0-84960977862&doi=10.1155%2f2016%2f1639805&partnerID=40&md5=ff7593e8cb5ee61cbd744792bdb0bd35
relation: 10.1155/2016/1639805
identifier: 10.1155/2016/1639805