TY  - JOUR
VL  - 13
UR  - https://www.scopus.com/inward/record.uri?eid=2-s2.0-84989179721&doi=10.1587%2felex.13.20160773&partnerID=40&md5=85ba6e6e2f9a082b5129f8caa39d3d51
JF  - IEICE Electronics Express
A1  - Mian, M.U.
A1  - Dennis, J.O.
A1  - Khir, M.H.B.M.
A1  - Ahmed, M.G.A.
A1  - Rabih, A.A.S.
A1  - Tang, T.B.
SN  - 13492543
PB  - Institute of Electronics Information Communication Engineers
Y1  - 2016///
KW  - Lorentz force; Magnetic fields; MEMS
KW  -  Capacitive; Displacement; Lateral displacements; Low driving voltage; Magnetic sensitivity; Micro-electro-mechanical; MS3110; PolyMUMP
KW  -  Resonators
TI  - Optical and capacitive characterization of MEMS magnetic resonator
ID  - scholars7813
N2  - In this paper a Lorentz force driven Micro ELectro Mechanical Sytems (MEMS) resonator fabricated on PolyMUMP process with optical and capacitive sensing is presented. The resonator is designed by combining the two poly layers which result in an increase in the thickness of the resonator. Lorentz force generates lateral displacements at low driving voltages which are proportional to the magnetic field and the input current. A displacement of more than 9.8 μm was achieved with a magnetic field of 0.12 T and a driving current of 27 mA. Magnetic sensitivity of 1.41 V/Tin air was experimentally measured using permanent magnets and capacitive sensing circuitry. Optical results demonstrate the sensitivity values between 0.090 μm/mT and 0.074 μm m/mT. © IEICE 2016.
N1  - cited By 1
IS  - 18
AV  - none
ER  -