Jan, M.T. and Ahmad, F. and Hamid, N.H.B. and Md Khir, M.H.B. and Ashraf, K. and Shoaib, M.
(2016)
Temperature dependent Young's modulus and quality factor of CMOS-MEMS resonator: Modelling and experimental approach.
Microelectronics Reliability, 57.
pp. 64-70.
ISSN 00262714