Jan, M.T. and Ahmad, F. and Hamid, N.H.B. and Md Khir, M.H.B. and Ashraf, K. and Shoaib, M. (2016) Temperature dependent Young's modulus and quality factor of CMOS-MEMS resonator: Modelling and experimental approach. Microelectronics Reliability, 57. pp. 64-70. ISSN 00262714