?url_ver=Z39.88-2004&rft_id=10.1088%2F1757-899X%2F114%2F1%2F012046&rft_val_fmt=info%3Aofi%2Ffmt%3Akev%3Amtx%3Abook&rft.aufirst=N.M.&rft.aulast=Elsiti&rft.au=Elsiti%2C+N.M.&rft.issn=17578981&rft.title=Fabrication+of+high+aspect+ratio+micro+electrode+by+using+EDM&rft.date=2016&rft.genre=proceeding