Ahmed, M.G.A. and Dennis, J.O. and Khair, M.H.M. and Rabih, A.A.S. and Mian, M.U.
(2016)
Characterization of embedded micro-heater and temperature sensor in a CMOS-MEMS resonator for gas sensing.
International Journal of Applied Engineering Research, 11 (6).
pp. 4381-4386.
ISSN 09734562