?url_ver=Z39.88-2004&rft_val_fmt=info%3Aofi%2Ffmt%3Akev%3Amtx%3Ajournal&rft.au=Ahmed%2C+M.G.A.&rft.aulast=Ahmed&rft.aufirst=M.G.A.&rft.pages=4381-4386&rft.atitle=Characterization+of+embedded+micro-heater+and+temperature+sensor+in+a+CMOS-MEMS+resonator+for+gas+sensing&rft.issue=6&rft.volume=11&rft.issn=09734562&rft.date=2016&rft.title=International+Journal+of+Applied+Engineering+Research&rft.genre=article