TY  - JOUR
AV  - none
SP  - 1
TI  - Frequency and displacement analysis of electrostatic cantilever-based MEMS sensor
N1  - cited By 14
SN  - 09251030
PB  - Springer Science and Business Media, LLC
EP  - 11
KW  - Analytical models; Blood; Electromechanical coupling; Electromechanical devices; Electrostatic force; MEMS; Natural frequencies; Nonlinear equations
KW  -  Cantilever; COMSOL; Displacement analysis; Frequency shift; Linear time invariant; Microelectromechanical system sensors; Resonance frequencies; Simulink
KW  -  Nanocantilevers
ID  - scholars6959
IS  - 1
N2  - In this work we present behavior level modeling to predict the frequency and displacement of electrostatic cantilever based microelectromechanical system sensor for mass detection. Linear time invariant (LTI) technique is used to study the linear and nonlinear behavior of the device. The shift in resonance frequency in damped and undamped medium is formulated by using the conception of dynamic mass and law of identity. First a complete analytical model is developed by coupling electrostatic force with the bending moment of cantilever to produce vertical actuation at a resonance frequency. Then displacement of the cantilever is correlated with piezoresistive mechanism for mass sensing. We assumed mass of blood cells as the external load on cantilever tip which results in shift in resonance frequency. Simulink tool is used to develop the LTI model that is based on electromechanical coupling of linear and nonlinear equations. The same device is then designed using COMSOL tool and FEM analysis is performed. For validation, the analytical results are compared with the FEM simulations. © 2016, Springer Science+Business Media New York.
Y1  - 2016///
VL  - 88
UR  - https://www.scopus.com/inward/record.uri?eid=2-s2.0-84955313383&doi=10.1007%2fs10470-016-0695-3&partnerID=40&md5=c99464f13515626c3dc14367a824cc0e
JF  - Analog Integrated Circuits and Signal Processing
A1  - Shoaib, M.
A1  - Hisham, N.
A1  - Basheer, N.
A1  - Tariq, M.
ER  -