?url_ver=Z39.88-2004&rft_id=10.1007%2Fs10470-016-0695-3&rft_val_fmt=info%3Aofi%2Ffmt%3Akev%3Amtx%3Ajournal&rft.aufirst=M.&rft.au=Shoaib%2C+M.&rft.aulast=Shoaib&rft.title=Analog+Integrated+Circuits+and+Signal+Processing&rft.date=2016&rft.issue=1&rft.volume=88&rft.issn=09251030&rft.atitle=Frequency+and+displacement+analysis+of+electrostatic+cantilever-based+MEMS+sensor&rft.pages=1-11&rft.genre=article