eprintid: 6903
rev_number: 2
eprint_status: archive
userid: 1
dir: disk0/00/00/69/03
datestamp: 2023-11-09 16:18:42
lastmod: 2023-11-09 16:18:42
status_changed: 2023-11-09 16:07:58
type: article
metadata_visibility: show
creators_name: Jan, M.T.
creators_name: Ahmad, F.
creators_name: Hamid, N.H.B.
creators_name: Khir, M.H.B.M.
creators_name: Shoaib, M.
creators_name: Ashraf, K.
title: Experimental investigation of temperature and relative humidity effects on resonance frequency and quality factor of CMOS-MEMS paddle resonator
ispublished: pub
keywords: Atmospheric humidity; Environmental chambers; Field emission microscopes; Frequency response; Microelectromechanical devices; Natural frequencies; Power inductors; Resonators; Scanning electron microscopy; Temperature; Temperature distribution, CMOS-MEMS; Effects of temperature; Experimental approaches; Experimental investigations; Field emission scanning electron microscopy; Quality factors; Resonance frequencies; Temperature and relative humidity, Resonance
note: cited By 27
abstract: This paper reports an experimental approach to analyse the performance of an externally actuated CMOS-MEMS paddle resonator with proof mass. The surface morphology test of the device is performed with the help of field emission scanning electron microscopy (FESEM), before and after the reliability tests. The effects of temperature variation on the resonance frequency response of the fabricated CMOS-MEMS resonator is analysed under the variation of temperature from 25 °C to 80 °C inside a custom made environmental chamber at a constant relative humidity (32RH). In the next step, the variation in the quality factor of the MEMS resonator is studied under the effect of varying temperature. Finally, the resonance frequency behavior is analysed under the variation of relative humidity from 32RH to 90RH at a constant temperature of 25 °C. The device is found to be eroded and there are some wastes of humidity on it. A total change of 6.9 Hz in resonance frequency is recorded from 25 °C to 80 °C. The drop in the resonance frequency of the MEMS device is found to be 137 MHz/°C with the rise in temperature. Under the temperature variation from 25 °C to 80 °C, the quality factor is found to be nonlinear. A total change of 1.3 Hz in the resonance frequency is observed from 32RH to 90RH. The resonance frequency is found to be � 21.8 MHz/RH with an increasing humidity level. © 2016 Elsevier Ltd
date: 2016
publisher: Elsevier Ltd
official_url: https://www.scopus.com/inward/record.uri?eid=2-s2.0-84969909664&doi=10.1016%2fj.microrel.2016.05.007&partnerID=40&md5=ac58e6641572aed51fc2dd58023e0a65
id_number: 10.1016/j.microrel.2016.05.007
full_text_status: none
publication: Microelectronics Reliability
volume: 63
pagerange: 82-89
refereed: TRUE
issn: 00262714
citation:   Jan, M.T. and Ahmad, F. and Hamid, N.H.B. and Khir, M.H.B.M. and Shoaib, M. and Ashraf, K.  (2016) Experimental investigation of temperature and relative humidity effects on resonance frequency and quality factor of CMOS-MEMS paddle resonator.  Microelectronics Reliability, 63.  pp. 82-89.  ISSN 00262714