eprintid: 6860
rev_number: 2
eprint_status: archive
userid: 1
dir: disk0/00/00/68/60
datestamp: 2023-11-09 16:18:39
lastmod: 2023-11-09 16:18:39
status_changed: 2023-11-09 16:07:51
type: article
metadata_visibility: show
creators_name: Naz, M.Y.
creators_name: Shukrullah, S.
creators_name: Sulaiman, S.A.
creators_name: Najeeb-Ur-Rehman, 
creators_name: Khan, Y.
creators_name: Ghaffar, A.
creators_name: Ullah, S.
title: Investigations on spatial distribution of low temperature plasma parameters using NiCr wire probe diagnostic
ispublished: pub
keywords: Binary alloys; Chromium alloys; Electric discharges; Plasma devices; Plasma theory; Probes; Spatial distribution; Temperature; Wave plasma interactions, Distribution measurement; Electron number densities; Low temperature plasmas; Ni-Cr alloys; Number density; Potential difference; RF plasma; Triple langmuir probes, Electron temperature
note: cited By 3
abstract: This study investigated the workability of a NiCr wire probe diagnostic under low temperature plasma operating conditions. The aim of the work was to design and fabricate a triple Langmuir probe with NiCr alloy for measurements in low temperature rf plasmas. The spatial distribution of electron temperature and number density were evaluated at different filling pressures in the range of 0.2-0.4 mbar and rf powers in the range of 200-400 W. The probe data revealed a linear increase in temperature and electron number density with rf power along the chamber centerline, whereas an inverse relationship was found between the given plasma parameters and filling gas pressure. The spatial distribution measurements showed a decreasing trend in plasma parameters at positions away from the chamber centerline. The probe I-V characteristics curve revealed a change in polarity of probe potential with an increase in current supply from the plasma discharge to the probe. Initially, the potential difference raised from highly negative values to zero volt, thereafter started increasing positively. It is found that the response of NiCr alloy as probe material was appreciably good under the proposed operating conditions. © 2016 Elsevier Ltd. All rights reserved.
date: 2016
publisher: Elsevier B.V.
official_url: https://www.scopus.com/inward/record.uri?eid=2-s2.0-84969939932&doi=10.1016%2fj.measurement.2016.05.047&partnerID=40&md5=3b5456da1ed085674a6242cc0d0adbaf
id_number: 10.1016/j.measurement.2016.05.047
full_text_status: none
publication: Measurement: Journal of the International Measurement Confederation
volume: 91
pagerange: 194-200
refereed: TRUE
issn: 02632241
citation:   Naz, M.Y. and Shukrullah, S. and Sulaiman, S.A. and Najeeb-Ur-Rehman and Khan, Y. and Ghaffar, A. and Ullah, S.  (2016) Investigations on spatial distribution of low temperature plasma parameters using NiCr wire probe diagnostic.  Measurement: Journal of the International Measurement Confederation, 91.  pp. 194-200.  ISSN 02632241