?url_ver=Z39.88-2004&rft_id=10.1016%2Fj.jart.2016.06.005&rft_val_fmt=info%3Aofi%2Ffmt%3Akev%3Amtx%3Ajournal&rft.aufirst=M.K.&rft.au=Baig%2C+M.K.&rft.aulast=Baig&rft.date=2016&rft.title=Journal+of+Applied+Research+and+Technology&rft.pages=287-292&rft.atitle=Pulsed+laser+deposition+of+SmCo+thin+films+for+MEMS+applications&rft.issue=5&rft.volume=14&rft.issn=16656423&rft.genre=article