?url_ver=Z39.88-2004&rft_id=10.1007%2Fs00542-015-2606-4&rft_val_fmt=info%3Aofi%2Ffmt%3Akev%3Amtx%3Ajournal&rft.aufirst=J.O.&rft.aulast=Dennis&rft.au=Dennis%2C+J.O.&rft.atitle=Post+micromachining+of+MPW+based+CMOS%C3%A2%EF%BF%BD%EF%BF%BDMEMS+comb+resonator+and+its+mechanical+and+thermal+characterization&rft.pages=2909-2919&rft.issue=12&rft.volume=22&rft.issn=09467076&rft.date=2016&rft.title=Microsystem+Technologies&rft.genre=article