Dennis, J.O. and Ahmed, A.Y. and Md. Khir, M.H. and Rabih, A.A.S.
(2015)
Modelling and simulation of the effect of air damping on the frequency and quality factor of a CMOS-MEMS resonator.
Applied Mathematics and Information Sciences, 9 (2).
pp. 729-737.
ISSN 19350090