?url_ver=Z39.88-2004&rft_id=10.3390%2Fs150716674&rft_val_fmt=info%3Aofi%2Ffmt%3Akev%3Amtx%3Ajournal&rft.aufirst=J.-O.&rft.au=Dennis%2C+J.-O.&rft.aulast=Dennis&rft.title=Sensors+(Switzerland)&rft.issn=14248220&rft.atitle=Fabrication+and+characterization+of+a+CMOS-MEMS+humidity+sensor&rft.volume=15&rft.date=2015&rft.pages=16674-16687&rft.issue=7&rft.genre=article