eprintid: 5879
rev_number: 2
eprint_status: archive
userid: 1
dir: disk0/00/00/58/79
datestamp: 2023-11-09 16:17:37
lastmod: 2023-11-09 16:17:37
status_changed: 2023-11-09 16:04:08
type: conference_item
metadata_visibility: show
creators_name: Shoaib, M.
creators_name: Hisham, N.
creators_name: Basheer, N.
creators_name: Tariq, M.
title: Frequency analysis of electrostatic cantilever-based MEMS sensor
ispublished: pub
keywords: Electromechanical devices; Electrostatic force; Electrostatics; MEMS; Nanocantilevers; Natural frequencies; Resonance, Analytical approach; Analytical results; cantilever; COMSOL; Frequency shift; MEMS (microelectromechanical system); Resonance frequencies; Simulink, Analytical models
note: cited By 3; Conference of 17th Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2015 ; Conference Date: 27 April 2015 Through 30 April 2015; Conference Code:115667
abstract: This paper presents an analytical approach to model the dynamic behavior and predict the frequency of electrostatic cantilever based MEMS (Microelectromechanical system) sensor for mass detection. The concept of dynamic mass is used to formulate the resonance frequency in damped and undamped medium. In the modeling, electrostatic force is coupled with the bending moment of cantilever to produce actuation at a resonance frequency. Mass of blood cells is used as an external load on the cantilever which results in shift in resonance frequency. This shift due to additional mass is sensed by the piezoresistive mechanism. The device analytical model is integrated using Simulink tool to study the dynamic behavior. The same device is then designed using COMSOL tool and FEM analysis is performed. The analytical results are compared with the simulated results. © 2015 IEEE.
date: 2015
publisher: Institute of Electrical and Electronics Engineers Inc.
official_url: https://www.scopus.com/inward/record.uri?eid=2-s2.0-84945943332&doi=10.1109%2fDTIP.2015.7161013&partnerID=40&md5=3c5cea622071e3a88600330fcba59298
id_number: 10.1109/DTIP.2015.7161013
full_text_status: none
publication: Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2015
refereed: TRUE
isbn: 9781479986255
citation:   Shoaib, M. and Hisham, N. and Basheer, N. and Tariq, M.  (2015) Frequency analysis of electrostatic cantilever-based MEMS sensor.  In: UNSPECIFIED.