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primary topic: Frequency analysis of electrostatic cantilever-based MEMS sensor

Frequency analysis of electrostatic cantilever-based MEMS sensor
type: AcademicArticle
type: Article
abstract: This paper presents an analytical approach to model the dynamic behavior and predict the frequency of electrostatic cantilever based MEMS (Microelectromechanical system) sensor for mass detection. The concept of dynamic mass is used to formulate the resonance frequency in damped and undamped medium. In the modeling, electrostatic force is coupled with the bending moment of cantilever to produce actuation at a resonance frequency. Mass of blood cells is used as an external load on the cantilever which results in shift in resonance frequency. This shift due to additional mass is sensed by the piezoresistive mechanism. The device analytical model is integrated using Simulink tool to study the dynamic behavior. The same device is then designed using COMSOL tool and FEM analysis is performed. The analytical results are compared with the simulated results. © 2015 IEEE.
date: 2015
status: peerReviewed
status: published
author list: authors
type: EPrint
type: ConferenceItemEPrint
is part of: repository

Institute of Electrical and Electronics Engineers Inc.
type: Organization

Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2015
type: Collection

N. Basheer
type: Person
given name: N.
family name: Basheer

M. Shoaib
type: Person
given name: M.
family name: Shoaib

N. Hisham
type: Person
given name: N.
family name: Hisham

M. Tariq
type: Person
given name: M.
family name: Tariq

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primary topic: Frequency analysis of electrostatic cantilever-based MEMS sensor