?url_ver=Z39.88-2004&rft_id=10.1109%2FDTIP.2015.7161013&rft_val_fmt=info%3Aofi%2Ffmt%3Akev%3Amtx%3Abook&rft.aufirst=M.&rft.au=Shoaib%2C+M.&rft.aulast=Shoaib&rft.title=Frequency+analysis+of+electrostatic+cantilever-based+MEMS+sensor&rft.isbn=9781479986255&rft.date=2015&rft.genre=proceeding