eprintid: 5866
rev_number: 2
eprint_status: archive
userid: 1
dir: disk0/00/00/58/66
datestamp: 2023-11-09 16:17:36
lastmod: 2023-11-09 16:17:36
status_changed: 2023-11-09 16:04:05
type: conference_item
metadata_visibility: show
creators_name: Mian, M.U.
creators_name: Dennis, J.O.
creators_name: Md. Khir, M.H.
creators_name: Riaz, K.
creators_name: Iqbal, A.
creators_name: Bazaz, S.A.
creators_name: Tang, T.B.
title: MEMS 3-DoF gyroscope design, modeling and simulation through equivalent circuit lumped parameter model
ispublished: pub
note: cited By 2; Conference of 23rd Scientific Conference of Microscopy Society Malaysia, SCMSM 2014 ; Conference Date: 10 December 2014 Through 12 December 2014; Conference Code:113582
abstract: Pre-fabrication, behavioural and performance analysis with computer aided design (CAD) tools is a common and fabrication cost effective practice. In light of this we present a simulation methodology for a dual-mass oscillator based 3 Degree of Freedom (3-DoF) MEMS gyroscope. 3-DoF Gyroscope is modeled through lumped parameter models using equivalent circuit elements. These equivalent circuits consist of elementary components which are counterpart of their respective mechanical components, used to design and fabricate 3-DoF MEMS gyroscope. Complete designing of equivalent circuit model, mathematical modeling and simulation are being presented in this paper. Behaviors of the equivalent lumped models derived for the proposed device design are simulated in MEMSPRO T-SPICE software. Simulations are carried out with the design specifications following design rules of the MetalMUMPS fabrication process. Drive mass resonant frequencies simulated by this technique are 1.59 kHz and 2.05 kHz respectively, which are close to the resonant frequencies found by the analytical formulation of the gyroscope. The lumped equivalent circuit modeling technique proved to be a time efficient modeling technique for the analysis of complex MEMS devices like 3-DoF gyroscopes. The technique proves to be an alternative approach to the complex and time consuming couple field analysis Finite Element Analysis (FEA) previously used. © 2015 AIP Publishing LLC.
date: 2015
publisher: American Institute of Physics Inc.
official_url: https://www.scopus.com/inward/record.uri?eid=2-s2.0-85012018355&doi=10.1063%2f1.4919163&partnerID=40&md5=ea12ea0013237f77d3500f1489e3dde6
id_number: 10.1063/1.4919163
full_text_status: none
publication: AIP Conference Proceedings
volume: 1669
refereed: TRUE
isbn: 9780735413160
issn: 0094243X
citation:   Mian, M.U. and Dennis, J.O. and Md. Khir, M.H. and Riaz, K. and Iqbal, A. and Bazaz, S.A. and Tang, T.B.  (2015) MEMS 3-DoF gyroscope design, modeling and simulation through equivalent circuit lumped parameter model.  In: UNSPECIFIED.