?url_ver=Z39.88-2004&rft_id=10.1063%2F1.4919163&rft_val_fmt=info%3Aofi%2Ffmt%3Akev%3Amtx%3Abook&rft.aufirst=M.U.&rft.au=Mian%2C+M.U.&rft.aulast=Mian&rft.title=MEMS+3-DoF+gyroscope+design%2C+modeling+and+simulation+through+equivalent+circuit+lumped+parameter+model&rft.date=2015&rft.issn=0094243X&rft.isbn=9780735413160&rft.genre=proceeding