%X Carbon nanotubes (CNTs) are one of the most researched materials due to their exceptional mechanical and electrical properties. Among the various techniques, catalytic chemical vapor deposition in a fluidized bed reactor is the most promising technique for bulk production of CNTs. To meet the demand of good quality along with the bulk production of CNTs, the effect of reaction temperature on the micro structures, morphology, diameter, quality and quantity of CNTs was investigated in these studies. CNTs were synthesized at process temperature ranging from 700-850°C by catalytic decomposition of C 2 H 4 on Fe 2 O 3 /Al 2 O 3 catalyst a vertical fluidized bed reactor. The microstructures of the grown CNTs at different reaction temperatures were investigated by using scanning electron microscope. The results of this study depicted a positive correlation between the average diameter of CNTs and reaction temperature. Narrow diameters (35�40 nm) of CNTs with fewer defects were found at the low and mild temperatures, in particular 800°C. At this temperature, a dynamic equilibrium between the rate of C 2 H 4 decomposition and CNTs quantity was found due to maximum carbon diffusion over catalyst. The CNTs produced with Fe 2 O 3 /Al 2 O 3 catalyst wer e also exhibiting high quality with relatively small mean outer diameter and fewer surface defects. © 2015 AIP Publishing LLC. %J AIP Conference Proceedings %L scholars5845 %O cited By 0; Conference of 23rd Scientific Conference of Microscopy Society Malaysia, SCMSM 2014 ; Conference Date: 10 December 2014 Through 12 December 2014; Conference Code:113582 %R 10.1063/1.4919183 %D 2015 %A S. Shukrullah %A N.M. Mohamed %A M.S. Shaharun %I American Institute of Physics Inc. %V 1669 %T Effect of process temperature on morphology of CNTs grown in a vertically fluidized bed reactor with Fe 2 O 3 /Al 2 O 3 catalyst