?url_ver=Z39.88-2004&rft_id=10.1109%2FISMS.2015.27&rft_val_fmt=info%3Aofi%2Ffmt%3Akev%3Amtx%3Abook&rft.aufirst=A.&rft.aulast=Rabih&rft.au=Rabih%2C+A.&rft.date=2015&rft.issn=21660662&rft.title=Modelling+and+Simulation+of+Polysilicon+Piezoresistors+in+CMOS-MEMS+Resonator+for+Biomarker+Detection+in+Exhaled+Breath&rft.isbn=9781479982578&rft.genre=proceeding