eprintid: 5620
rev_number: 2
eprint_status: archive
userid: 1
dir: disk0/00/00/56/20
datestamp: 2023-11-09 16:17:21
lastmod: 2023-11-09 16:17:21
status_changed: 2023-11-09 16:03:21
type: conference_item
metadata_visibility: show
creators_name: Pandian, M.S.
creators_name: Marigo, E.
creators_name: Shunmugam, M.
creators_name: Hussain, R.B.
creators_name: Song, C.T.W.
creators_name: Din, J.B.J.
creators_name: Fei, C.B.
creators_name: Madhaven, V.
creators_name: Kantimahanti, A.K.
creators_name: Malik, A.F.
creators_name: Jeoti, V.
title: Investigation on Surface Acoustic Wave propagation for a non-planar piezoelectric thin film device
ispublished: pub
keywords: Acoustic surface wave devices; Acoustic waves; Acoustics; Aluminum; Aluminum coatings; Aluminum nitride; Deposition; Nitrides; Physical vapor deposition; Piezoelectricity; Thin film devices; Thin films; Transducers; Ultrasonic transducers; Vapor deposition, Aluminum nitride (AlN); Coupling coefficient; Interdigital transducer; Physical vapor deposition process; Piezoelectric thin film devices; SAW delay line; Surface acoustic wave propagation; Thin film surfaces, Acoustic wave propagation
note: cited By 4; Conference of IEEE International Ultrasonics Symposium, IUS 2015 ; Conference Date: 21 October 2015 Through 24 October 2015; Conference Code:118680
abstract: In this paper we present a study on the surface acoustic wave propagation performance and coupling coefficient for a non-planar thin film Surface Acoustic Wave device (SAW). Piezoelectric Aluminum Nitride (AlN) thin film is deposited on top of the Inter Digital Transducer (IDT) by a non conformal physical vapor deposition process. Non-planarity around the transducer impedes the wave propagation, this effect is investigated using SAW delay lines. © 2015 IEEE.
date: 2015
publisher: Institute of Electrical and Electronics Engineers Inc.
official_url: https://www.scopus.com/inward/record.uri?eid=2-s2.0-84962027616&doi=10.1109%2fULTSYM.2015.0362&partnerID=40&md5=83a99f813178e28a58277d041eee5a12
id_number: 10.1109/ULTSYM.2015.0362
full_text_status: none
publication: 2015 IEEE International Ultrasonics Symposium, IUS 2015
refereed: TRUE
isbn: 9781479981823
citation:   Pandian, M.S. and Marigo, E. and Shunmugam, M. and Hussain, R.B. and Song, C.T.W. and Din, J.B.J. and Fei, C.B. and Madhaven, V. and Kantimahanti, A.K. and Malik, A.F. and Jeoti, V.  (2015) Investigation on Surface Acoustic Wave propagation for a non-planar piezoelectric thin film device.  In: UNSPECIFIED.